ATLEX-500-I
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications
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ATLEX-500-I main features:
- Soft corona preionization
- HV-solid state pulser
- Laser head volume < 3l
- TMC (Total-Metal-Ceramic) Vessel
- Integrated vacuum pump & halogen filter
- Air Cooled / Optional Liquid Cooled, active thermal management
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Energy stabilization mode
- Dynamic fan speed controls
- Meets European CE-standard
- RoHS compliance
Details
Applications
- Micromachining
- Laser ablation
- Medicine (refractive surgery)
- Spectroscopy
- Metrology
Date
- 30th April 2015
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ATLEX-500-I Specifications
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Gas Medium
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F2 | ArF | KrF | XeCl | XeF | Units |
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Wavelength
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157 | 193 | 248 | 308 | 351 | nm |
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High Voltage Switching Technique
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Solid State Switch | |||||
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Max. Pulse Energy 1
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1 | 10 | 15 | 8 | 7 | mJ |
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Max. Average Power
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0.5
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4.0 |
6.5 |
3.0 |
2.5 |
W |
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Max. Rep Rate
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500 |
Hz |
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Pulse Duration 2
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5 – 8 | ns | ||||
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Beam Dimensions 2 (V x H)
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4 x 6 | mm | ||||
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Beam Divergence 2 (V x H)
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1 x 2 | mrad | ||||
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Energy Stability (standard deviation)
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< 3 | % | ||||
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Dimensions (LxWxH) click here for details
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540 x 470 x 370 | mm | ||||
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Weight
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60 | kg | ||||
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Cooling
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Cooling Air / Optional Liquid | |||||
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Power requirement
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230 VAC / 6,3 A / 1 phase / 50-60 Hz | |||||
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All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode. |
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