ATLEX-I

A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 

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ATLEX-I main features:

  • Soft corona preionization
  • HV-solid state pulser
  • Laser head volume < 3l
  • TMC (Total-Metal-Ceramic) Vessel
  • Integrated vacuum pump & halogen filter
  • Air Cooled / Optional Liquid Cooled, active thermal management
  • RS-485, RS232, USB and fiber optic Interface for system integration
  • Flushable optics holder
  • Energy stabilization mode
  • Dynamic fan speed controls
  • Meets European CE-standard
  • RoHS compliance

Details

Applications

  • Micromachining
  • Laser ablation
  • Medicine (refractive surgery)
  • Spectroscopy
  • Metrology
Datasheet


ATLEX-I Specifications
Gas Medium
 F2 ArF KrF XeCl XeF Units
Wavelength
 157 193 248 308 351 nm
High Voltage Switching Technique
Solid State Switch
Maximum Pulse Energy 1
 1 8 15 8 7 mJ
Stabilized Pulse Energy 0.5 4 8 4 3.5 mJ
Stabilized Average Power
ATLEX-300-I
ATLEX-500-I

0.15
0.25
1.2
2
2.4
4
1.2
2
1
1.7
W
W
Max. Rep Rate
ATLEX-300-I
ATLEX-500-I
  
300
500		  
Hz
Hz
Pulse Duration 2
 5 – 8 ns
Beam Dimensions 2 (V x H)
 4 x 6 mm
Beam Divergence 2 (V x H)
 1 x 2 mrad
Energy Stability (standard deviation)
 < 2 %
Dimensions (LxWxH)
 540 x 470 x 370 mm
Weight
 60 kg
Cooling
 Air / Liquid  
Power requirements
 230 VAC / 6,3 A / 1 phase / 50-60 Hz  

All specifications are typical data and subject to change without notice due to product improvements.

1 Measured at 20Hz; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM

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