A new generation of compact air-cooled, excimer lasers, designed for low duty cycle applications
ATLEX-LR Specifications
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Gas Medium
|
ArF | Units |
Wavelength
|
193 | nm |
High Voltage Switching Technique | Solid State Switch | |
Maximum Pulse Energy 1
|
12 | mJ |
Stabilized Pulse Energy | 4 | mJ |
Stabilized Average Power | 1.2 | W |
Max. Rep. Rate | 300 | Hz |
Pulse Duration 2
|
5 | ns |
Beam Dimensions 2 (V x H)
|
4 x 6 | mm |
Beam Divergence 2 (V x H)
|
1 x 2 | mrad |
Energy Stability (standard deviation)
|
< 2 | % |
Dimensions (LxWxH)
|
540 x 470 x 370 | mm |
Weight
|
60 | kg |
Cooling
|
Air | |
Power requirements
|
230 VAC / 6,3 A / 1 phase / 50-60 Hz |
All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at 20Hz; allow 10% reduction of output energy and power for laser equipped with stabilization mode. |
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