A new generation of compact air-cooled, excimer lasers, designed for low duty cycle applications 

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ATLEX-LR main features:

  • Extremely fast pulse rise-time and peak power density
  • Laser head volume < 3l
  • TMC (Total-Metal-Ceramic) vessel
  • Integrated vacuum pump & halogen filter
  • Totally air-cooled, active thermal management
  • RS-485, RS232, USB and fiber optic interface for system integration
  • Flushable optics holder
  • Energy stabilization mode
  • Dynamic fan speed controls
  • Meets European CE-standard
  • RoHS compliance



  • Optimized 193 nm laser performance for LA-ICP-MS.
  • Similar technical parameters as the ATLEX-I.
  • Extremely fast pulse rise-time and peak power density

  • 30th April 2015
ATLEX-LR Specifications
Gas Medium
ArF Units
193 nm
Max. Pulse Energy 1
12 mJ
Max. stab. Energy 10 mJ
Pulse Duration 2
5 ns
Beam Dimensions 2 (V x H)
4 x 6 mm
Beam Divergence 2 (V x H)
1 x 2 mrad
Energy Stability (standard deviation)
< 2 %
Dimensions (LxWxH) click here for details
540 x 470 x 370 mm
60 kg
Power requirement
230 VAC / 6,3 A / 1 phase / 50-60 Hz  

All specifications are typical data and subject to change without notice due to product improvements.

1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM

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