ATLEX-L
New industrial excimer lasers
ATLEX-L main features:
- TMC (Total-Metal-Ceramic) Vessel
- Corona Preionization
- Solid state switch
- Extended Dynamic & Static Gas-Lifetime (Several Months)
- Laser Head Volume 6 l
- Air Cooled / Optional Liquid Cooled
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Integrated 4-Valve System for Easy Gas Handling
- Dynamic fan speed controls
- Meets European CE-standard, RoHS compliant
- Modular Design / Service Friendly
Details
Datasheet
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ATLEX-L Specifications
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Gas Medium
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ArF | KrF | Units |
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Wavelength
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193 | 248 | nm |
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High Voltage Switching Technique
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Solid State Switch | ||
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Maximum Pulse Energy 1
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8 | 15 | mJ |
| Stabilized Pulse Energy | 4 | 8 | mJ |
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Stabilized Average Power
ATLEX-500-L ATLEX-1000-L |
2 4 |
4 8 |
W W |
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Max. Rep Rate
ATLEX-500-L ATLEX-1000-L |
500 1000 |
Hz Hz |
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Pulse Duration 2
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5 – 8 | ns | |
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Beam Dimensions 2 (V x H)
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6 x 4 | mm | |
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Beam Divergence 2 (V x H)
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2 x 1 | mrad | |
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Energy Stability (standard deviation)
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< 2 | % | |
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Dimensions (LxWxH)
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600 x 415 x 572 | mm | |
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Weight
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70 | kg | |
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Cooling
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Air / Liquid | ||
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Power requirements
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230 VAC / 10 A / 1 Phase / 50-60 Hz | ||
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All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at 20Hz; allow 10% reduction of output energy and power for laser equipped with stabilization mode. |
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Other wavelengths upon request. |
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