ATLEX 1000 L
New industrial excimer lasers
ATLEX-1000-L main features:
- TMC (Total-Metal-Ceramic) Vessel
- Corona Preionization
- Solid state switch
- Extended Dynamic & Static Gas-Lifetime (Several Months)
- Laser Head Volume 6 l
- Air Cooled / Optional Liquid Cooled
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Integrated 4-Valve System for Easy Gas Handling
- Dynamic fan speed controls
- Meets European CE-standard, RoHS compliant
- Modular Design / Service Friendly
Details
Date
- 18th November 2021
|
ATLEX-1000-L Specifications
|
|||
|
Gas Medium
|
ArF | KrF | Units |
|
Wavelength
|
193 | 248 | nm |
|
High Voltage Switching Technique
|
Solid State Switch | ||
|
Max. Pulse Energy 1
|
10 | 15 | mJ |
|
Max. Average Power
|
8.0 | 10.0 | W |
|
Max. Rep Rate
|
1000 | Hz |
|
|
Pulse Duration 2
|
5 – 8 | ns | |
|
Beam Dimensions 2 (V x H)
|
6 x 4 | mm | |
|
Beam Divergence 2 (V x H)
|
2 x 1 | mrad | |
|
Energy Stability (standard deviation)
|
< 2 | % | |
|
Dimensions (LxWxH) click here for details
|
600 x 415 x 567 | mm | |
|
Weight
|
70 | kg | |
|
Cooling
|
Cooling Air / Optional Liquid | ||
|
Power requirement
|
230 VAC / 10 A / 1 Phase / 50-60 Hz | ||
|
All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode. |
Copyrights © 2024 & All Rights Reserved by ATL Lasertechnik GmbH
Impressum
Datenschutzerklärung