ATLEX 1000 L

New industrial excimer lasers

Media Player UI
Media Player UI
Media Player UI
Media Player UI
Media Player UI
Media Player UI

ATLEX-1000-L main features:

  • TMC (Total-Metal-Ceramic) Vessel
  • Corona Preionization
  • Solid state switch
  • Extended Dynamic & Static Gas-Lifetime (Several Months)
  • Laser Head Volume 6 l
  • Air Cooled / Optional Liquid Cooled
  • RS-485, RS232, USB and fiber optic Interface for system integration
  • Flushable optics holder
  • Integrated 4-Valve System for Easy Gas Handling
  • Meets European CE-standard, RoHS compliant
  • Modular Design / Service Friendly

Details

Date
  • 30th October 2019
ATLEX-1000-L Specifications
Gas Medium
ArF KrF Units
Wavelength
193 248 nm
High Voltage Switching Technique
Solid State Switch
Max. Pulse Energy 1
10 15 mJ
Max. Average Power
 8.0  10.0  W
Max. Rep Rate
 1000  Hz
Pulse Duration 2
5 – 8 ns
Beam Dimensions 2 (V x H)
6 x 4 mm
Beam Divergence 2 (V x H)
2 x 1 mrad
Energy Stability (standard deviation)
< 2 %
Dimensions (LxWxH) click here for details
600 x 415 x 567 mm
Weight
70 kg
Cooling
Cooling Air / Optional Liquid  
Power requirement
230 VAC / 10 A / 1 Phase / 50-60 Hz  


All specifications are typical data and subject to change without notice due to product improvements.

1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM


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