ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications
ATLEX-S Specifications |
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Gas Medium |
ArF | KrF | Units | ||
Wavelength |
193 | 248 | nm | ||
High Voltage Switching Technique |
Solid State Switch | Solid State Switch | |||
Max. Rep. Rate |
300 | 500 | 300 | 500 | Hz |
Max. Pulse Energy 1 |
10 | 10 | 15 | 15 | mJ |
Max. Average Power |
2,4 |
4 |
4 |
6 |
W |
Pulse Duration 2 |
5 – 8 | ns | |||
Beam Dimensions 2 (V x H) |
4 x 6 | mm | |||
Beam Divergence 2 (V x H) |
1 x 2 | mrad | |||
Energy Stability (standard deviation) |
< 3 | % | |||
Dimensions (LxWxH) click here for details |
630 x 400 x 300 | mm | |||
Weight |
65 | kg | |||
Cooling |
Air | ||||
Power requirement |
230 VAC / 6,3 A / 1 phase / 50-60 Hz |
All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode. |
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