ATLEX 500 L
New industrial excimer lasers
ATLEX-500-L main features:
- TMC (Total-Metal-Ceramic) Vessel
- Corona Preionization
- Solid state switch
- Extended Dynamic & Static Gas-Lifetime (Several Months)
- Laser Head Volume 6 l
- Air Cooled / Optional Liquid Cooled
- RS-485, RS232, USB and fiber optic Interface for system integration
- Flushable optics holder
- Integrated 4-Valve System for Easy Gas Handling
- Energy stabilization mode
- Dynamic fan speed controls
- Meets European CE-standard, RoHS compliant
- Modular Design / Service Friendly
Details
Date
- 30th October 2019
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ATLEX-500-L Specifications
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Gas Medium
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ArF | KrF | Units |
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Wavelength
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193 | 248 | nm |
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High Voltage Switching Technique
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Solid State Switch | ||
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Max. Pulse Energy 1
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10 | 15 | mJ |
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Max. Average Power
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4.0 | 6.5 | W |
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Max. Rep Rate
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500 | Hz |
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Pulse Duration 2
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5 – 8 | ns | |
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Beam Dimensions 2 (V x H)
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6 x 4 | mm | |
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Beam Divergence 2 (V x H)
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2 x 1 | mrad | |
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Energy Stability (standard deviation)
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< 2 | % | |
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Dimensions (LxWxH) click here for details
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600 x 415 x 567 | mm | |
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Weight
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70 | kg | |
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Cooling
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Cooling Air / Optional Liquid | ||
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Power requirement
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230 VAC / 10 A / 1 Phase / 50-60 Hz | ||
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All specifications are typical data and subject to change without notice due to product improvements. 1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode. |
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