ATLEX-500-I

A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 

Media Player UI
Media Player UI
Media Player UI
Media Player UI

ATLEX-500-I main features:

  • Soft corona preionization
  • HV-solid state pulser
  • Laser head volume < 3l
  • TMC (Total-Metal-Ceramic) Vessel
  • Integrated vacuum pump & halogen filter
  • Totally air-cooled, active thermal management
  • RS-485, RS232, USB and fiber optic Interface for system integration
  • Flushable optics holder
  • Energy stabilization mode
  • Meets European CE-standard
  • RoHS compliance

Details

Applications

  • Micromachining
  • Laser ablation
  • Medicine (refractive surgery)
  • Spectroscopy
  • Metrology
Date
  • 30th April 2015
ATLEX-500-I Specifications
Gas Medium
F2 ArF KrF XeCl XeF Units
Wavelength
157 193 248 308 351 nm
High Voltage Switching Technique
Solid State Switch
Max. Pulse Energy 1
1 10 15 8 7 mJ
Max. Average Power
0.5
 4.0
6.5
3.0
 2.5
W
Max. Rep Rate
 500
 Hz
Pulse Duration 2
5 – 8 ns
Beam Dimensions 2 (V x H)
4 x 6 mm
Beam Divergence 2 (V x H)
1 x 2 mrad
Energy Stability (standard deviation)
< 3 %
Dimensions (LxWxH) click here for details
540 x 470 x 370 mm
Weight
60 kg
Cooling
Air  
Power requirement
230 VAC / 6,3 A / 1 phase / 50-60 Hz  

All specifications are typical data and subject to change without notice due to product improvements.

1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM


Copyrights © 2017 & All Rights Reserved by ATL Lasertechnik GmbH
Impressum
Datenschutzerklärung